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A test system for ensuring material reliability in micro- and nanoelectronics
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2007
Conference Paper
Title
A test system for ensuring material reliability in micro- and nanoelectronics
Title Supplement
Abstract
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Author(s)
Wittler, O.
Auerswald, E.
Dermitzaki, E.
Gollhardt, A.
May, D.
Schmitz, S.
Wunderle, B.
Michel, B.
Mainwork
NanoScience 2007. Volume of abstracts
Conference
Conference of Advanced Science (NanoScience) 2007
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM