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Numerical approach to extraction of elasto-plastic material models and corresponding properties of thin layers through nanoindentation technique
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2009
Conference Paper
Title
Numerical approach to extraction of elasto-plastic material models and corresponding properties of thin layers through nanoindentation technique
Author(s)
Wymyslowski, A.
Wittler, O.
Mrossko, R.
Dudek, R.
Auersperg, J.
Dowhan, L.
Mainwork
10th International Conference on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2009
Conference
International Conference on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems 2009
DOI
10.1109/ESIME.2009.4938422
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM