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  4. Numerical approach to extraction of elasto-plastic material models and corresponding properties of thin layers through nanoindentation technique
 
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2009
Conference Paper
Title

Numerical approach to extraction of elasto-plastic material models and corresponding properties of thin layers through nanoindentation technique

Author(s)
Wymyslowski, A.
Wittler, O.
Mrossko, R.
Dudek, R.
Auersperg, J.
Dowhan, L.
Mainwork
10th International Conference on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2009  
Conference
International Conference on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems 2009  
DOI
10.1109/ESIME.2009.4938422
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
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