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Monocrystalline diode bolometer made by low temperature direct wafer bonding
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2009
Conference Paper
Title
Monocrystalline diode bolometer made by low temperature direct wafer bonding
Author(s)
Kropelnicki, P.
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS
Vogt, H.
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS
Mainwork
WaferBond 2009, Conference on Wafer Bonding for Microsystems, 3D- and Wafer Level Integration
Conference
Conference on Wafer Bonding for Microsystems, 3D- and Wafer Level Integration 2009
Language
English
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS
Keyword(s)
diode bolometer
low temperature direct wafer bond
