Removal and transfer of material in laser-assisted physical vapour deposition of ceramics

The removal and transfer of ceramic target materials in laserassisted physical vapour deposition are investigated as a function of laser parameters and processing variables. Removal was measured by a microbalance and characteristics of distribution, transfer by emission spectroscopy and high-speed photography. The composition, the ionization state of the particles and the electron temperature of the vapour/plasma govern the structures of the thin filsm deposited, which are discussed in view of applications.