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  4. Surface order evaluation of the heteroepitaxial diamond film grown on an inclined ß-SIC(001)
 
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2000
Journal Article
Title

Surface order evaluation of the heteroepitaxial diamond film grown on an inclined ß-SIC(001)

Other Title
Untersuchung der Oberflächenstruktur von heteroepitaktischem Diamant auf geneigtem ß-SIC(001) Substrat
Abstract
The surface order of a heteroepitaxial diamond (001) film grown on an inclined beta-SiC(001) has been evaluated with a micro-electron beam in ultra-high-vacuum. It was determined that the range of order of surface dimer-rows of the heteroepitaxialdiamond film is about 15 A.U.
Author(s)
Kono, S.
Goto, T.
Abukawa, T.
Wild, C.
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Koidl, P.
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Kawarada, H.
Journal
Japanese Journal of Applied Physics. Part 1, Regular papers, short notes and review papers  
DOI
10.1143/JJAP.39.4372
Language
English
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Keyword(s)
  • diamond

  • CVD diamond

  • Diamant

  • CVD-Diamant

  • heteroepitaxy

  • Heteroepitaxie

  • diamond surface

  • Diamantoberfläche

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