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Recent advances and trends in numerical techniques for process simulation
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1995
Conference Paper
Title
Recent advances and trends in numerical techniques for process simulation
Author(s)
Joppich, W.
Mijalkovic, S.
Mainwork
20th International Conference on Microelectronics, MIEL '95. Proceedings. Vol.1
Conference
International Conference on Microelectronics (MIEL) 1995
DOI
10.1109/ICMEL.1995.500885
Language
English
Fraunhofer-Institut für Algorithmen und Wissenschaftliches Rechnen SCAI
