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Thin Film Encapsulation of Microstructures using sacrificial CF-Polymer
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2007
Conference Paper
Title
Thin Film Encapsulation of Microstructures using sacrificial CF-Polymer
Author(s)
Reuter, D.
Bertz, A.
Werner, T.
Nowack, M.
Gessner, T.
Mainwork
Transducers & Eurosensors 2007. 14th International Conference on Solid-State Sensors, Actuators and Microsystems. Vol.1
Conference
European Conference on Solid-State Transducers (Eurosensors) 2007
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
