2005
Conference Paper
Title

Process integration of infrared-sensitive PIN photodiodes and CMOS transistors in a single-SiGe substrate

Author(s)
Nebrich, L.
Neumeier, K.
Stadler, A.
Weber, J.
Bensch, F.
Kreuzer, S.
Vogg, G.
Herrmann, K.
Klumpp, A.
Wieland, R.
Bonfert, D.
Soldner, W.
Ramm, P.
Mainwork
Conference
DOI
Language
English