AlScN Based Piezoelectrically Driven Quasi-Static MEMS Scanners with Large Field of View and Selectable Regions of Interest

AlScN driven quasi-static MEMS scanners demonstrate exceptional actuation force, precision and movement linearity, making them ideal for applications ranging from LiDAR to quantum computing. We investigate the separation of the piezoelectric layer on each actuator into a main and a sub segment for sensing and actuation purposes. Raw data shows a good sensitivity of up to 8 mV/°TOSA in resonant drive without data procession. When driving the main and sub segment quasi-statically the segmentation yields an 11 % performance increase despite reduced actuation area. Additionally, quasi-static deflections of 30° TOSA and complex scan patterns such as a controllable ROI scan can be performed to extend the system operation capabilities in applications like LiDAR or space communication.