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Evolution of intrinsic stress in nanocrystallin diamond film deposited by continuous H+ ion-bombardment
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2003
Journal Article
Title
Evolution of intrinsic stress in nanocrystallin diamond film deposited by continuous H+ ion-bombardment
Author(s)
Gu, C.Z.
Jiang, X.
Journal
Journal of vacuum science and technology B. Microelectronics and nanometer structures
DOI
10.1116/1.1609479
Language
English
Fraunhofer-Institut für Schicht- und Oberflächentechnik IST
