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  4. Polyimide-based capacitive humidity sensor
 
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2018
Journal Article
Title

Polyimide-based capacitive humidity sensor

Abstract
The development of humidity sensors with simple transduction principles attracts considerable interest by both scientific researchers and industrial companies. Capacitive humidity sensors, based on polyimide sensing material with different thickness and surface morphologies, are prepared. The surface morphology of the sensing layer is varied from flat to rough and then to nanostructure called nanograss by using an oxygen plasma etch process. The relative humidity (RH) sensor selectively responds to the presence of water vapor by a capacitance change. The interaction between polyimide and water molecules is studied by FTIR spectroscopy. The complete characterization of the prepared capacitive humidity sensor performance is realized using a gas mixing setup and an evaluation kit. A linear correlation is found between the measured capacitance and the RH level in the range of 5 to 85%. The morphology of the humidity sensing layer is revealed as an important parameter influencing the sensor performance. It is proved that a nanograss-like structure is the most effective for detecting RH, due to its rapid response and recovery times, which are comparable to or even better than the ones of commercial polymer-based sensors. This work demonstrates the readiness of the developed RH sensor technology for industrialization.
Author(s)
Boudaden, Jamila  
Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT  
Steinmaßl, Matthias  
Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT  
Endres, Hanns-Erik
Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT  
Drost, Andreas  
Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT  
Eisele, Ignaz  
Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT  
Kutter, Christoph  
Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT  
Müller-Buschbaum, Peter
Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT  
Journal
Sensors. Online journal  
Open Access
DOI
10.24406/publica-r-253236
10.3390/s18051516
File(s)
Download (4.56 MB)
Rights
CC BY 4.0: Creative Commons Attribution
Language
English
Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT  
Keyword(s)
  • capacitive sensor

  • humidity sensor

  • fourier transform

  • infrared spectroscopy

  • humidity sensor

  • polyimide

  • surface morphology

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