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SIMOX and wafer bonding, combination of competitors complements one another
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1993
Conference Paper
Title
SIMOX and wafer bonding, combination of competitors complements one another
Author(s)
Gassel, H.
Vogt, H.
Mainwork
Electrochemical Society Meeting '93. Extended Abstracts
Conference
Electrochemical Society (Meeting) 1993
Language
English
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS
Keyword(s)
Ätzen
Ätzgeschwindigkeit
buried etch stop
etch rate
etching
silicon-on-insulator
SIMOX
wafer bonding