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Manufacture of 3D structures for micro systems with advanced shadow casting lithography
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1994
Conference Paper
Title
Manufacture of 3D structures for micro systems with advanced shadow casting lithography
Author(s)
Cullmann, E.
Löchel, B.
Engelmann, G.
Mainwork
Micro-system technologies '94
Conference
International Conference on Micro Electro, Opto, Mechanic Systems and Components 1994
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
