Eddy current imaging for electrical characterization of solar cells

High frequency Eddy Current imaging technology is developed and enables to obtain information of different depth level in conductive thin-film structures with poor electrical conductivity. In this paper, we summarize the state of the art applications focusing on PV industry and extend the analysis by implementing Eddy Current C-scan imaging. The specific state of frequency and complex phase angle rotation demonstrates diverse defects from front to back side of silicon solar cells as well as characterizing homogeneity of sheet resistance in Transparent Conductive Oxide (TCO) layers. In order to have technical feasibility, measurement results from the Multi Parameter Eddy Current Scanner, MPECS are compared to the results from Electroluminescence.