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Approach to a machine-integrated measurement device for the interferometric testing of ultraprecise surfaces
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2004
Conference Paper
Title
Approach to a machine-integrated measurement device for the interferometric testing of ultraprecise surfaces
Author(s)
Pfeifer, Tilo
Dörner, Dirk
Schneefuß, Karsten
Mainwork
Photonics in measurement
Conference
International Symposium on Photonics in Measurement 2004
Language
English
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