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A parallel tool for the simulation of thermal oxidation and diffusion processes
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1997
Conference Paper
Title
A parallel tool for the simulation of thermal oxidation and diffusion processes
Author(s)
Hackenberg, M.
Joppich, W.
Mijalkovic, S.
Sontowski, T.
Mainwork
21th International Conference on Microelectronics 1997. Proceedings. Vol.1
Conference
International Conference on Microelectronics (MIEL) 1997
DOI
10.1109/ICMEL.1997.625175
Language
English
Fraunhofer-Institut für Algorithmen und Wissenschaftliches Rechnen SCAI
