2010
Conference Paper
Title

The impact of helium co-implantation on hydrogen induced donor profiles in float zone silicon

Author(s)
Laven, J.G.
Job, R.
Schulze, H.-J.
Niedernostheide, F.-J.
Häublein, V.  
Schulze, H.
Schustereder, W.
Ryssel, H.
Frey, L.
Mainwork
Conference
Language
English