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Strength and fatigue investigations of polycrystalline silicon
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2001
Conference Paper
Title
Strength and fatigue investigations of polycrystalline silicon
Author(s)
Bagdahn, J.
Sharpe, W.N.
Schischka, J.
Petzold, M.
Mainwork
Reliability, Testing, and Characterization of MEMS and MOEMS Conference
Conference
Reliability, Testing, and Characterization of MEMS and MOEMS Conference 2001
Language
English
Fraunhofer-Institut für Werkstoffmechanik IWM
