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1996
Journal Article
Title
Infrared Raman scattering as a sensitive probe for the thermal conductivity of chemical vapor deposited diamond films
Other Title
Infrarot-Ramanstreuung als empfindliche Sonde für die thermische Leitfähigkeit mittels chemischer Gasphasenabscheidung hergestellter Diamantfilme
Abstract
The infrared Raman spectrum of chemical vapor deposited (CVD) diamond films has been correlated with the in-plane thermal conductivity of the films. The scattering strength of the 1332 cm(exp -1) zone-center phonon line of diamond, measured relative to the intensity of the nondiamond carbon phase, was found to increase strongly with increasing thermal conductivity. A good correlation between these two properties was found even for the highest quality CVD diamond films with peak thermal conductivities up to 54 W/cm K. The dependence of the peak thermal conductivity on the intensity of the 1332 cm(exp -1) phonon line normalized to the scattering strength of the nondiamond carbon phase can be described by a power law with an exponent of 0.5.
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