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  4. Infrared Raman scattering as a sensitive probe for the thermal conductivity of chemical vapor deposited diamond films
 
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1996
Journal Article
Title

Infrared Raman scattering as a sensitive probe for the thermal conductivity of chemical vapor deposited diamond films

Other Title
Infrarot-Ramanstreuung als empfindliche Sonde für die thermische Leitfähigkeit mittels chemischer Gasphasenabscheidung hergestellter Diamantfilme
Abstract
The infrared Raman spectrum of chemical vapor deposited (CVD) diamond films has been correlated with the in-plane thermal conductivity of the films. The scattering strength of the 1332 cm(exp -1) zone-center phonon line of diamond, measured relative to the intensity of the nondiamond carbon phase, was found to increase strongly with increasing thermal conductivity. A good correlation between these two properties was found even for the highest quality CVD diamond films with peak thermal conductivities up to 54 W/cm K. The dependence of the peak thermal conductivity on the intensity of the 1332 cm(exp -1) phonon line normalized to the scattering strength of the nondiamond carbon phase can be described by a power law with an exponent of 0.5.
Author(s)
Wörner, E.
Wagner, J.
Müller-Sebert, W.
Wild, C.
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Koidl, P.
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Journal
Applied Physics Letters  
DOI
10.1063/1.116261
Language
English
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Keyword(s)
  • chemical vapor deposition

  • chemical vapour deposition

  • Diamantfilm

  • diamond films

  • Gasphasenabscheidung

  • raman spectroscopy

  • Ramanspektroskopie

  • thermal conductivity

  • thermische Leitfähigkeit

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