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  4. A DLTS study of hydrogen doped Czochralski-grown silicon
 
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2014
Poster
Title

A DLTS study of hydrogen doped Czochralski-grown silicon

Title Supplement
Poster presented at IBMM 2014, 19th International Conference on Ion Beam Modification Materials, Leuven, Belgium, September 14-19, 2014
Author(s)
Jelinek, Moriz
Infineon Technologies Austria AG
Laven, Johannes G.
Infineon Technologies AG
Kirnstoetter, S.
Institute of Solid State Physics Graz University of Technology
Schustereder, Werner
Infineon Technologies Austria AG
Schulze, Hans-Joachim
Infineon Technologies AG
Rommel, Mathias  orcid-logo
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Frey, Lothar
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Conference
International Conference on Ion Beam Modification of Materials (IBMM) 2014  
File(s)
Download (1.18 MB)
Rights
Use according to copyright law
DOI
10.24406/publica-fhg-387260
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
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