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A DLTS study of hydrogen doped Czochralski-grown silicon
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2014
Poster
Title
A DLTS study of hydrogen doped Czochralski-grown silicon
Title Supplement
Poster presented at IBMM 2014, 19th International Conference on Ion Beam Modification Materials, Leuven, Belgium, September 14-19, 2014
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Author(s)
Jelinek, Moriz
Infineon Technologies Austria AG
Laven, Johannes G.
Infineon Technologies AG
Kirnstoetter, S.
Institute of Solid State Physics Graz University of Technology
Schustereder, Werner
Infineon Technologies Austria AG
Schulze, Hans-Joachim
Infineon Technologies AG
Rommel, Mathias
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
Frey, Lothar
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
Conference
International Conference on Ion Beam Modification of Materials (IBMM) 2014
DOI
10.24406/publica-fhg-387260
File(s)
N-345716.pdf (1.18 MB)
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Rights
Under Copyright
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB