English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Reactive pulse magnetron sputtering for deposition of piezoelectric AlN layers
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
2012
Conference Paper
Title
Reactive pulse magnetron sputtering for deposition of piezoelectric AlN layers
Author(s)
Glöß, D.
Bartzsch, H.
Gittner, M.
Frach, P.
Herzog, T.
Walter, S.
Heuer, H.
Mainwork
SENSORDEVICES 2011, the Second International Conference on Sensor Device Technologies and Applications. WISH 2011, the First International Workshop on Intelligent Sensor Hub
Conference
International Conference on Sensor Device Technologies and Applications (SENSORDEVICES) 2011
Language
English
Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik FEP
