1995
Journal Article
Title

Cubic boron nitride films prepared by reactive r.f. - and d.c. sputtering from different boron containing targets

Author(s)
Schütze, A.
Bewilogua, K.
Lüthje, H.
Kouptsidis, S.
Jäger, S.
Journal
DOI
Language
English
Keyword(s)