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  4. Special arc modes with reduced macroparticle emission
 
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2018
Book Article
Title

Special arc modes with reduced macroparticle emission

Abstract
A promising way towards arc deposited carbon films of higher perfectness consists in the reduction or even complete suppression of the macroparticle emission in addition to or instead of their troublesome separation.
Author(s)
Schultrich, Bernd  
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Mainwork
Tetrahedrally Bonded Amorphous Carbon Films I  
DOI
10.1007/978-3-662-55927-7_12
Language
English
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
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