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Application oriented modifications of deposition processes for DLC-based coatings
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1995
Conference Paper
Title
Application oriented modifications of deposition processes for DLC-based coatings
Author(s)
Grischke, M.
Bewilogua, K.
Trojan, K.
Dimigen, H.
Mainwork
4th International Conference on Plasma Surface Engineering 1994. Papers
Conference
International Conference on Plasma Surface Engineering 1994
DOI
10.1016/0257-8972(94)08201-4
Language
English
Fraunhofer-Institut für Schicht- und Oberflächentechnik IST
