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Defect inspection @ 50 nm defect size described by a binomial model
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2005
Conference Paper
Title
Defect inspection @ 50 nm defect size described by a binomial model
Author(s)
Nutsch, A.
Mainwork
6th European AEC/APC Conference Dublin 2005. CD-ROM
Conference
European Advanced Equipment Control / Advanced Process Control Conference 2005
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
