2005
Doctoral Thesis
Title

Anlagenentwicklung und experimentelle Untersuchungen zur Züchtung von CaF2-Kristallen für die Mikrolitographie

Other Title
Development of the crystal growth facility and experimental investigation of CaF2 crystal growth for microlithography
Thesis Note
Erlangen-Nürnberg, Univ., Diss., 2005
Author(s)
Molchanov, A.
Publishing Place
Erlangen
Language
German