System level modeling of piezo-resistive pressure sensors including technology data and parasitic effects

Up to now the behavioral analysis of piezo-resistive pressure sensors by modeling and simulation has been performed on different levels of abstraction and has mainly been focused on piezo-resistive effect itself. In many cases integrated pressure sensors have to meet high demands regarding their technical specifications (sensitivity, linearity, bursting strength, etc.) The presented work aims at a comprehensive modeling of importand physical effects including parasitics using a behavioral description language. A modular modeling flow was defined and implemented.