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  4. Multi-sensor system for real-time monitoring of laser micro-structuring
 
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2019
Conference Paper
Title

Multi-sensor system for real-time monitoring of laser micro-structuring

Author(s)
Zuric, Milena  
Nottrodt, Oliver  
Abels, Peter  
Mainwork
8th International Congress on Laser Advanced Materials Processing, LAMP 2019  
Conference
International Congress on Laser Advanced Materials Processing (LAMP) 2019  
Language
English
Fraunhofer-Institut für Lasertechnik ILT  
Keyword(s)

  • real-time monitoring

  • online process monitoring

  • ultrashort pulse laser structuring

  • laser micromachining

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