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Angular characteristicts of argon ion fluxes at the rf-powered electrode of a parallel-plate reactor
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1995
Journal Article
Title
Angular characteristicts of argon ion fluxes at the rf-powered electrode of a parallel-plate reactor
Author(s)
Börnig, K.
Janes, J.
Journal
Microelectronic engineering
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
