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In-situ spectroscopic ellipsometry and photometry for magnetron sputter process control
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2000
Journal Article
Title
In-situ spectroscopic ellipsometry and photometry for magnetron sputter process control
Author(s)
Vergöhl, M.
Malkolmes, N.
Matthee, T.
Bräuer, G.
Journal
Thin solid films
Conference
International Conference on Metallurgical Coatings and Thin Films 2000
Language
English
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
