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High temperature degradation of Pt/Ti electrodes in micro-hotplate gas sensors
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2003
Journal Article
Title
High temperature degradation of Pt/Ti electrodes in micro-hotplate gas sensors
Author(s)
Puigcorbe, J.
Vogel, D.
Michel, B.
Vila, A.
Gracia, I.
Cane, C.
Morante, J.R.
Journal
Journal of micromechanics and microengineering
DOI
10.1088/0960-1317/13/4/320
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM