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PSM-X2: Polysilicon surface micromachining process platform for vacuum-packaged sensors
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2005
Conference Paper
Title
PSM-X2: Polysilicon surface micromachining process platform for vacuum-packaged sensors
Author(s)
Merz, P.
Reinert, W.
Reimer, K.
Wagner, B.
Mainwork
Mikrosystemtechnik Kongress 2005
Conference
Mikrosystemtechnik Kongress 2005
Language
German
Fraunhofer-Institut für Siliziumtechnologie ISIT