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  4. Light processing with electrostatically driven micro scanning mirrors and micro mirror arrays
 
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2004
Book Article
Titel

Light processing with electrostatically driven micro scanning mirrors and micro mirror arrays

Author(s)
Schenk, H.
Dauderstädt, U.
Dürr, P.
Gehner, A.
Wolter, A.
Lakner, H.
Hauptwerk
MicroNano Integration
Thumbnail Image
Language
English
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Fraunhofer-Institut für Photonische Mikrosysteme IPMS
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