Monolithisch integrierte Sensorsysteme hergestellt in CMOS-Technology
This paper is focused on monolithically integrated sensorsystems fabricated in CMOS-technology. Based on fabrication process the systems were divided into the three classes. an illumination measurement chip, an infrared radiation sensorsystem and an integrated fluxgate sensor serve as examples for these classes. data of these examples were given in order to show the advantages of the fabrication of the sensor and the readout circuitry and bias circuitry on the same chip.