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Development of high-efficient NIR-scanning gratings for spectroscopic applications
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2006
Conference Paper
Titel
Development of high-efficient NIR-scanning gratings for spectroscopic applications
Author(s)
Zimmer, F.
Sandner, T.
GrĂ¼ger, H.
Heberer, A.
Wolter, A.
Schenk, H.
Lakner, H.
Kenda, A.
Scherf, W.
Hauptwerk
MOEMS display, imaging, and miniaturized microsystems IV
Konferenz
Conference "MOEMS, Display, Imaging, and Miniaturized Microsystems" 2006
DOI
10.1117/12.644481
Language
English
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Fraunhofer-Institut fĂ¼r Photonische Mikrosysteme IPMS
Tags
reflection grating
spectrometer
spectroscopy
scanning grating
micro scanning mirror...