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Simulation of ALD chemistry of copper metalorganic precursors on Ta(110) Surface
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2014
Conference Paper
Title
Simulation of ALD chemistry of copper metalorganic precursors on Ta(110) Surface
Author(s)
Hu, X.
Schuster, Jörg
Schulz, Stefan E.
Geßner, Thomas
Mainwork
MAM 2014, Workshop on "Materials for Advanced Metallization". CD-ROM
Conference
Workshop on "Materials for Advanced Metallization" (MAM) 2014
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
