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A modular approach for simulation-based optimization of MEMS
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2000
Conference Paper
Titel
A modular approach for simulation-based optimization of MEMS
Author(s)
Schneider, P.
Parodat, S.
Schneider, A.
Schwarz, P.
Hauptwerk
Design, modeling, and simulation in microelectronics
Konferenz
Conference on Design, Modeling, and Simulation in Microelectronics 2000
Language
English
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