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Back-end-of the line compatible homogeneous coating of vertical aligned carbon nanotubes with a conductive diffusion barrier for interconnect applications
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2012
Conference Paper
Title
Back-end-of the line compatible homogeneous coating of vertical aligned carbon nanotubes with a conductive diffusion barrier for interconnect applications
Author(s)
Fiedler, H.
Ecke, Ramona
Hermann, Sascha
Schulz, Stefan E.
Geßner, Thomas
Mainwork
3rd International Conference on Nanotechnology: Fundamentals and Applications, ICNFA 2012. Proceedings. CD-ROM
Conference
International Conference on Nanotechnology - Fundamentals and Applications (ICNFA) 2012
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
