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Energy- and angle distributions of argon ions and neutrals at the rf-powered electrode of a parallel-plate reactor
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1993
Conference Paper
Title
Energy- and angle distributions of argon ions and neutrals at the rf-powered electrode of a parallel-plate reactor
Author(s)
Börnig, K.
Hoppe, W.
Pelka, J.
Mainwork
21st International Conference on Phenomena in Ionized Gases '93. Proceedings
Conference
International Conference on Phenomena in Ionized Gases 1993
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
