Analysis of the mechanical vibration and acoustic behavior of a piezoelectric MEMS microspeaker

This paper investigates the performance of a piezoelectric MEMS-based microspeaker. The performance is compared to the state of the art in terms of electrodynamic microspeakers for mobile applications. The analysis is twofold: First, the mechanical behavior is evaluated using laser interferometry and discussed for different stimuli such as sine sweeps or static sinusoidal excitation. Second, the acoustic performance is assessed by way of measurements under anechoic conditions. Results show that the speaker performs well for its size while providing low power consumption. However, in order to achieve high broadband reproduction quality, further design improvements are necessary.