Modification of the process dynamics in micro-EDM by means of an additional piezo-control system

For the application of spark erosion in micro- and precision manufacturing, it is particularly important that small structures with small spark gaps can be machined in the range of a few micrometers. Due to the application of an additional high- dynamic piezo positioning system, smaller feed steps can be implemented which ensure a higher process stability. This additional feed system can be adapted to existing feed systems, whereby the process variable to be influenced is the spark gap. The primary feed system does not have to be directly influenced. The article shows how the structures of parallel regulation circuits for such operating piezo positioning systems are constructed and how they can improve the productivity, the machining accuracy and the surface quality. A selected example shows how the structural design of the highly dynamic system can be designed for different process parameters of industrial basic systems.