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Crystallite misorientation analysis in semiconductor wafers and ELO samples by rocking curve imaging
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2006
Conference Paper
Title
Crystallite misorientation analysis in semiconductor wafers and ELO samples by rocking curve imaging
Author(s)
Mikulik, P.
Lübbert, D.
Pernot, P.
Helfen, L.
Baumbach, T.
Mainwork
E-MRS 2005 Spring Meeting. Symposium P: Current trends in optical and X-ray metrology of advanced materials for nanoscale devices. Proceedings
Conference
Symposium P "Current Trends in Optical and X-Ray Metrology of Advanced Materials for Nanoscale Devices 2005
European Materials Research Society (Spring Meeting) 2005
DOI
10.1016/j.apsusc.2006.05.084
Language
English
IZFP-D
