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HARMST, High Aspect Ratio Micro Structure Technology Workshop. Editorial
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2007
Conference Paper
Title
HARMST, High Aspect Ratio Micro Structure Technology Workshop. Editorial
Title Supplement
Gyenogju, Korea, 10-13 June 2005
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Author(s)
Kwon, T.H.
Michel, Bernd
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
Mainwork
High Aspect Ratio Micro Structure Technology Workshop 2005. Special issue. Vol.1
Conference
High Aspect Ratio Micro Structure Technology Workshop (HARMST) Gyenogju
DOI
10.1007/s00542-006-0229-5
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
