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Integration of multi-level MOEMS structure on CMOS for spatial light modulators
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2013
Conference Paper
Title
Integration of multi-level MOEMS structure on CMOS for spatial light modulators
Author(s)
Friedrichs, Martin
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
List, Matthias
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Müller, Michael
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Mainwork
Smart Systems Integration 2013. CD-ROM
Conference
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components 2013
File(s)
Download (2.35 MB)
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Rights
Use according to copyright law
DOI
10.24406/publica-fhg-379799
Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Keyword(s)
MOEMS
sacrificial layer technique
surface micromachining
