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Aluminum-germanium wafer bonding of (AlGaIn)N thin film light-emitting diodes
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2011
Conference Paper
Title
Aluminum-germanium wafer bonding of (AlGaIn)N thin film light-emitting diodes
Title Supplement
Abstract
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Author(s)
Gossler, C.
Kunzer, M.
Baum, Mario
Wiemer, Maik
Moser, R.
Passow, T.
Koehler, K.
Schwarz, U.T.
Wagner, J.
Mainwork
WaferBond 2011, Conference on Wafer Bonding for Microsystems, 3D- and Wafer Level Integration. Book of Abstracts
Conference
Conference on Wafer Bonding for Microsystems, 3D- and Wafer Level Integration (WaferBond) 2011
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS