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Effects of oxygen and forming gas annealing on ZnO-TFTs
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2010
Poster
Title
Effects of oxygen and forming gas annealing on ZnO-TFTs
Title Supplement
Poster at MRS Fall Meeting 2010, Boston
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Author(s)
Huang, J.
Krishna, U.R.
Lemberger, M.
Jank, M.P.M.
Polster, S.
Ryssel, H.
Frey, L.
Conference
Materials Research Society (Fall Meeting) 2010
Symposium F "Low-Temperature-Processed Thin-Film Transistors" 2010
DOI
10.24406/publica-fhg-368140
File(s)
002.pdf (179.79 KB)
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Rights
Under Copyright
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
Keyword(s)
annealing
ZnO-TFTs
sputtering