Time-resolved diagnosis of processes in PLD of ceramics

The material transfer of ceramics (Alsub2Osub3, ZrOsub3) in pulsed laser deposition (PLD) is studied as a function of pulsed CO2 laser radiation parameters and processing variables. Timeresolved measurements of the composition and the electrontemperature as well as the geometry and dynamics of the vapour/plasma were obtained by emission spectroscopy and high-speed photography. The vapour/plasma states are related to the structures of ceramic films grown on metallic substrates.