High-speed miniaturized photodiode and parallel-fed traveling-wave photodetectors based on InP

A periodic parallel-fed traveling-wave photodetector (TWPD) with monolithically integrated power splitter is presented. The device exhibits an impedance match to the 5042 environment as well as a velocity match between the optical and electrical signals and shows a 3-dB bandwidth up to 85 GHz. The electrical output power reaches +10 dBm at 10 GHz. The device is based on evanescently coupled low-capacitance waveguide-integrated p-i-n photodiodes (PDs) with optimized optical matching layer which reveal a bandwidth of 145 GHz when employed as a stand-alone photodetector.