Micro/nano technologies towards smart systems integration

The micro and nano system technologies as well as electronics are playing a key role in today's product development and industrial progress. They enable the integration of mechanical, electrical, optical, chemical, biological and other functions into a very small space with dimensions ranging from sub micrometers up to some millimeters. This paper presents different examples of MEMS sensors and systems developed at Fraunhofer ENAS and Chemnitz University of Technology. It starts with silicon based technologies applied for MEMS laser displays and miniaturized MEMS spectrometer. The integration of new materials and new technologies is shown for point of care diagnostics.