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Different ion implanted edge terminations for Schottky diodes on SiC
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2003
Conference Paper
Title
Different ion implanted edge terminations for Schottky diodes on SiC
Author(s)
Weiss, R.
Frey, L.
Ryssel, H.
Mainwork
Ion implantation technology, IIT 2002
Conference
International Conference on Ion Implantation Technology (IIT) 2002
DOI
10.1109/IIT.2002.1257958
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
